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        Group/Department  

        Group/Department  

  Group/Department  

                                                                                 SYNTHESIS                                                                              

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Multi-material Cluster Tool

A cluster tool consisting of a high-pressure RHEED PLD growth system is connected via a vacuum transfer tunnel to an ultra-high vacuum sputtering deposition system, enabling in situ deposition of complex oxide and metal films.

 

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                                                                               CHARACTERIZATION                                                                            

RHEED-assisted Pulsed Laser Deposition (Ch-IA)

Pulsed-Laser Deposition Systems (Ch-IB)

Pulsed-Laser Deposition Systems (Ch-IC)

Excimer Lasers (L-I)

Coherent LPX

Coherent COMPex

Excimer Lasers (L-II)

Coherent LPX

DC and RF Sputtering

Metal and Oxide Sputtering tool shared with Material Engineering department

Metal Sputtering

Thermal (right) and E-beam (left) deposition

Molecular beam epitaxy (MBE) growth of nitride semiconductors

X-ray diffractometer (Bruker)

Atomic Force Microscopes-I

Asylum Research MFP-3D origin+ capable of AFM, PFM, c-AFM, MFM studies at voltages up to 200 V and temperatures up to 200°C

Atomic Force Microscopes-II

VECCO capable of AFM, PFM studies

Hall measurement system

High Temperature probe station-I

High Temperature probe station-II

Low Temperature probe station (under construction)

Photodetection measurement system

Photoluminescent measurement setup

        USER FACILITIES     

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